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Title:
BioNanoFluidic MEMS |
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Division: Nano-related / Springer / 英文版 |
Author/Editor: Peter J. Hesketh Star:  |
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ISBN: 0387462813 |
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Introduce Date: 2008年01月16日06:43 , Release Date: 2008年01月16日09:43 |
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Introducer: weir , Rate: 0/101 |
| Format: pdf(editorial) Download |
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| Description: |
BioNanoFluidic MEMS
Series: MEMS Reference Shelf
Hesketh, Peter J. (Ed.)
2008, 375 p. 100 illus., Hardcover
ISBN: 978-0-387-46281-3
About this book
* Comprehensively shows the interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
* Covers BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
* Includes hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
* Provides complete coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
BioNanoFluidic MEMS explains nanofabrication and nanomaterials synthesis suitable for the development of biosensors. The fundamentals initiate an awareness for engineers and scientists who would like to develop and implement novel biosensors for various applications. In addition, the material covered includes:
* BioNanoFluidic MEMS connection between the interdisciplinary nature of
BioNanoFluidics and MEMS
* BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
* Hands-on steps for implementation of biosensor fabrication including a discussion of the clean room lithography process and etching, microsensor systems lamination, PDMS moulding, parylene deposition, and others
* Interconnection between the interdisciplinary nature of BioNanoFluidics and MEMS
* BioNanoFluidics and sensor technology including Micro-Mechanical Sensors and Chemical Sensor Technologies
* Discussion of fabrication processes for implementation of biosensor and nanochemical sensors including the clean room lithography process, etching, chemical vapor deposition, electroplating, microsensor systems lamination, PDMS moulding, parylene deposition, and others
* Selected coverage of Nano/Microfabrication, Nano Manufacturing and Nano/Micro Integration
"The MEMS Reference Shelf is a series devoted to Micro-Electro-Mechanical Systems (MEMS), which combine mechanical,electrical, optical, or fluidic elements on a common microfabricated
substrate to create sensors, actuators, and microsystems. This series,authored by leading MEMS practitioners, strives to provide a framework where basic principles, known methodologies, and new applications are integrated in a coherent and consistent manner."
STEPHEN D. SENTURIAMassachusetts Institute of Technology, Professor of Electrical Engineering, Emiritus
Written for:
Research engineers, academics, and those involved in the biomedical field as it relates to medical applications using MEMs
Keywords:
BioNanoFluidic
Hesketh
http://www.springer.com/west/home?SGWID=4-102-22-173682108-0
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